chemicalvapordeposition(CVD)相关论文
用化学气相淀积(CVD)的方法, 在6H-SiC衬底上同质外延生长SiC层, 继而外延生长了Si1-yCy合金薄膜, 用X射线衍射(XRD)、扫描电子显......
应用相干反斯托克斯喇曼光谱(CARS)技术对硅甲烷(SiH4)的射频放电分解进行在位诊断.基于硅甲烷v1振动模CARS信号强度的变化,研究了......
Study of filament performance in heat transfer and hydrogen dissociation in diamond chemical vapor d
Hot-filament chemical vapor deposition (HFCVD) is a promising method for commercial production of diamond films.Filament......
